JPH0645896Y2 - 加速度計 - Google Patents
加速度計Info
- Publication number
- JPH0645896Y2 JPH0645896Y2 JP1468290U JP1468290U JPH0645896Y2 JP H0645896 Y2 JPH0645896 Y2 JP H0645896Y2 JP 1468290 U JP1468290 U JP 1468290U JP 1468290 U JP1468290 U JP 1468290U JP H0645896 Y2 JPH0645896 Y2 JP H0645896Y2
- Authority
- JP
- Japan
- Prior art keywords
- acceleration
- hollow housing
- flow sensor
- housing
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1468290U JPH0645896Y2 (ja) | 1990-02-19 | 1990-02-19 | 加速度計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1468290U JPH0645896Y2 (ja) | 1990-02-19 | 1990-02-19 | 加速度計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109059U JPH03109059U (en]) | 1991-11-08 |
| JPH0645896Y2 true JPH0645896Y2 (ja) | 1994-11-24 |
Family
ID=31518030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1468290U Expired - Lifetime JPH0645896Y2 (ja) | 1990-02-19 | 1990-02-19 | 加速度計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645896Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040017357A1 (en) * | 2000-08-29 | 2004-01-29 | Masahiro Kinoshita | Pointing device |
| JP4975972B2 (ja) * | 2005-03-15 | 2012-07-11 | 日立オートモティブシステムズ株式会社 | 物理量センサ |
-
1990
- 1990-02-19 JP JP1468290U patent/JPH0645896Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03109059U (en]) | 1991-11-08 |
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